质量流量计匹配相应控制器招标变更

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质量流量计匹配相应控制器招标变更


质量流量计(匹配相应控制器)(JJ24000185)延期公告
发布时间:2024-04-18 15:56:20阅读量:14

延期信息
延期理由:由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00


项目名称质量流量计(匹配相应控制器)项目编号JJ*
公告开始日期2024-04-18 15:56:20公告截止日期2024-04-21 15:00:00
采购单位东北大学付款方式
联系人成交后在我参与的项目中查看联系电话成交后在我参与的项目中查看
签约时间要求到货时间要求签约后3个工作日内
预算总价¥ *.00
发票要求
收货地址钢铁楼308
供应商资质要求

符合《政府采购法》第二十二条规定的供应商基本条件

公告说明由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00



采购清单1
采购商品采购数量计量单位所属分类
质量流量计(匹配相应控制器)7其他专用仪器仪表

品牌Brooks
型号5850E
预算单价¥ *.00
技术参数及配置要求Standard Ranges:
3 sccm to 30 slpm* (Nitrogen equivalent)
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard:0°C
and 101.3 kPa(760 Torr).
Accuracy:
±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability:
0.25% of rate
Response Time:
Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements(NC Valve):
+15 Vdc ±5%,35 mA
-15 Vdc ±5%,180 mA
3.5 watts power consumption
Power Requirements(NO Valve):
+15 Vdc ±5%,215 mA
-15 Vdc ±5%,180 mA
11.85 watts power consumption
Ambient Temperature Limits:
Operating:40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212F (-25C to 100°C)
Working Pressure:
1500 psi (10.342 mPa) maximum
Differential Pressure:
5 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.
Output Signal:
0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.
5 Volt Reference Output:
5 Volts ±0.2%. Maximum load 1 k ohms.
Temperature Sensitivity:
Zero: less than ±0.075% F.S. per degree C.
Span: less than ±1.0% F.S. shift over 10-50°C range
Power Supply Sensitivity:
±0.09% full scale per % power supply voltage variation
Mounting Attitude Sensitivity:
±0.5% maximum full scale deviation after re-zeroing
Command Input:
0-5 Vdc. Input resistance 200 k ohm
Leak Integrity:
1 x10-9Atm.cc/sec Helium
Control Range:
50 to 1
Mechanical Connection:
Compatible with most popular mass flow controllers. Refer to Figure 2-1.
Electrical Connection:
Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin
D-Connector(DA-15P)

东北大学

2024-04-18 15:56:20


质量流量计(匹配相应控制器)(JJ24000185)延期公告
发布时间:2024-04-18 15:56:20阅读量:14

延期信息
延期理由:由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00


项目名称质量流量计(匹配相应控制器)项目编号JJ*
公告开始日期2024-04-18 15:56:20公告截止日期2024-04-21 15:00:00
采购单位东北大学付款方式
联系人成交后在我参与的项目中查看联系电话成交后在我参与的项目中查看
签约时间要求到货时间要求签约后3个工作日内
预算总价¥ *.00
发票要求
收货地址钢铁楼308
供应商资质要求

符合《政府采购法》第二十二条规定的供应商基本条件

公告说明由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00



采购清单1
采购商品采购数量计量单位所属分类
质量流量计(匹配相应控制器)7其他专用仪器仪表

品牌Brooks
型号5850E
预算单价¥ *.00
技术参数及配置要求Standard Ranges:
3 sccm to 30 slpm* (Nitrogen equivalent)
*Standard temperature and pressure in accordance with SEMI
(Semiconductor Equipment and Materials International) standard:0°C
and 101.3 kPa(760 Torr).
Accuracy:
±1% full scale including linearity at calibration conditions.
±1.5% full scale including linearity for flow ranges greater than 20 slpm.
Repeatability:
0.25% of rate
Response Time:
Less than 3 seconds response to within 2% of full scale final value with a 0
to 100% command step.
Power Requirements(NC Valve):
+15 Vdc ±5%,35 mA
-15 Vdc ±5%,180 mA
3.5 watts power consumption
Power Requirements(NO Valve):
+15 Vdc ±5%,215 mA
-15 Vdc ±5%,180 mA
11.85 watts power consumption
Ambient Temperature Limits:
Operating:40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212F (-25C to 100°C)
Working Pressure:
1500 psi (10.342 mPa) maximum
Differential Pressure:
5 to 50 psi (minimum pressure drop depends on gas and range). Refer to
Orifice Sizing, Section 4-6.
Output Signal:
0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV.
5 Volt Reference Output:
5 Volts ±0.2%. Maximum load 1 k ohms.
Temperature Sensitivity:
Zero: less than ±0.075% F.S. per degree C.
Span: less than ±1.0% F.S. shift over 10-50°C range
Power Supply Sensitivity:
±0.09% full scale per % power supply voltage variation
Mounting Attitude Sensitivity:
±0.5% maximum full scale deviation after re-zeroing
Command Input:
0-5 Vdc. Input resistance 200 k ohm
Leak Integrity:
1 x10-9Atm.cc/sec Helium
Control Range:
50 to 1
Mechanical Connection:
Compatible with most popular mass flow controllers. Refer to Figure 2-1.
Electrical Connection:
Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin
D-Connector(DA-15P)

东北大学

2024-04-18 15:56:20

    
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