质量流量计匹配相应控制器招标变更
质量流量计匹配相应控制器招标变更
延期理由: | 由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00 |
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项目名称 | 质量流量计(匹配相应控制器) | 项目编号 | JJ* |
---|---|---|---|
公告开始日期 | 2024-04-18 15:56:20 | 公告截止日期 | 2024-04-21 15:00:00 |
采购单位 | 东北大学 | 付款方式 | |
联系人 | 成交后在我参与的项目中查看 | 联系电话 | 成交后在我参与的项目中查看 |
签约时间要求 | 到货时间要求 | 签约后3个工作日内 | |
预算总价 | ¥ *.00 | ||
发票要求 | |||
收货地址 | 钢铁楼308 | ||
供应商资质要求 | 符合《政府采购法》第二十二条规定的供应商基本条件 | ||
公告说明 | 由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00 |
采购商品 | 采购数量 | 计量单位 | 所属分类 |
---|---|---|---|
质量流量计(匹配相应控制器) | 7 | 台 | 其他专用仪器仪表 |
品牌 | Brooks |
---|---|
型号 | 5850E |
预算单价 | ¥ *.00 |
技术参数及配置要求 | Standard Ranges: 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard:0°C and 101.3 kPa(760 Torr). Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements(NC Valve): +15 Vdc ±5%,35 mA -15 Vdc ±5%,180 mA 3.5 watts power consumption Power Requirements(NO Valve): +15 Vdc ±5%,215 mA -15 Vdc ±5%,180 mA 11.85 watts power consumption Ambient Temperature Limits: Operating:40°F to 150°F (5°C to 65°C) Non-operating: -13°F to +212F (-25C to 100°C) Working Pressure: 1500 psi (10.342 mPa) maximum Differential Pressure: 5 to 50 psi (minimum pressure drop depends on gas and range). Refer to Orifice Sizing, Section 4-6. Output Signal: 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. 5 Volt Reference Output: 5 Volts ±0.2%. Maximum load 1 k ohms. Temperature Sensitivity: Zero: less than ±0.075% F.S. per degree C. Span: less than ±1.0% F.S. shift over 10-50°C range Power Supply Sensitivity: ±0.09% full scale per % power supply voltage variation Mounting Attitude Sensitivity: ±0.5% maximum full scale deviation after re-zeroing Command Input: 0-5 Vdc. Input resistance 200 k ohm Leak Integrity: 1 x10-9Atm.cc/sec Helium Control Range: 50 to 1 Mechanical Connection: Compatible with most popular mass flow controllers. Refer to Figure 2-1. Electrical Connection: Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin D-Connector(DA-15P) |
东北大学
2024-04-18 15:56:20
延期理由: | 由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00 |
---|
项目名称 | 质量流量计(匹配相应控制器) | 项目编号 | JJ* |
---|---|---|---|
公告开始日期 | 2024-04-18 15:56:20 | 公告截止日期 | 2024-04-21 15:00:00 |
采购单位 | 东北大学 | 付款方式 | |
联系人 | 成交后在我参与的项目中查看 | 联系电话 | 成交后在我参与的项目中查看 |
签约时间要求 | 到货时间要求 | 签约后3个工作日内 | |
预算总价 | ¥ *.00 | ||
发票要求 | |||
收货地址 | 钢铁楼308 | ||
供应商资质要求 | 符合《政府采购法》第二十二条规定的供应商基本条件 | ||
公告说明 | 由于该项目报价情况不满足要求,本项目延期至2024-04-21 15:00 |
采购商品 | 采购数量 | 计量单位 | 所属分类 |
---|---|---|---|
质量流量计(匹配相应控制器) | 7 | 台 | 其他专用仪器仪表 |
品牌 | Brooks |
---|---|
型号 | 5850E |
预算单价 | ¥ *.00 |
技术参数及配置要求 | Standard Ranges: 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard:0°C and 101.3 kPa(760 Torr). Accuracy: ±1% full scale including linearity at calibration conditions. ±1.5% full scale including linearity for flow ranges greater than 20 slpm. Repeatability: 0.25% of rate Response Time: Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% command step. Power Requirements(NC Valve): +15 Vdc ±5%,35 mA -15 Vdc ±5%,180 mA 3.5 watts power consumption Power Requirements(NO Valve): +15 Vdc ±5%,215 mA -15 Vdc ±5%,180 mA 11.85 watts power consumption Ambient Temperature Limits: Operating:40°F to 150°F (5°C to 65°C) Non-operating: -13°F to +212F (-25C to 100°C) Working Pressure: 1500 psi (10.342 mPa) maximum Differential Pressure: 5 to 50 psi (minimum pressure drop depends on gas and range). Refer to Orifice Sizing, Section 4-6. Output Signal: 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. 5 Volt Reference Output: 5 Volts ±0.2%. Maximum load 1 k ohms. Temperature Sensitivity: Zero: less than ±0.075% F.S. per degree C. Span: less than ±1.0% F.S. shift over 10-50°C range Power Supply Sensitivity: ±0.09% full scale per % power supply voltage variation Mounting Attitude Sensitivity: ±0.5% maximum full scale deviation after re-zeroing Command Input: 0-5 Vdc. Input resistance 200 k ohm Leak Integrity: 1 x10-9Atm.cc/sec Helium Control Range: 50 to 1 Mechanical Connection: Compatible with most popular mass flow controllers. Refer to Figure 2-1. Electrical Connection: Card edge, 20 terminals, gold over low stress nickel plated copper.15-pin D-Connector(DA-15P) |
东北大学
2024-04-18 15:56:20
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