中化国际招标有限责任公司受买方委托对下列产品及服务进行国际公开招标。现邀请合格投标人参加投标。
1、 招标产品的名称、数量及主要技术参数：
包1：多功能镀膜机 1台
1)、该设备具备等离子增强化学气相沉积系统（以下简称PECVD）及磁控溅射（直流、射频）功能，可进行介质膜（主要为SiO, SiN等）、金属膜（主要为Au、Ti、Cr等）等薄膜的制备；
2)、多功能镀膜机由PECVD系统和磁控溅射系统组成。PECVD系统主要由真空系统、反应室、进气系统、控制系统等组成。磁控溅射系统主要由镀膜腔室、真空系统、进气系统、测量系统、控制系统等组成。磁控溅射与PECVD系统工作时应互不干扰，设备的其他电气运行时，不得干扰膜厚监控系统运行及控制精度，本设备可以采用模块化系统集成;
3)、反应室本底真空：≤1mTorr，膜层均匀性：≤3%（基片尺寸100mm），沉积速率：SiO2膜>40nm/min，SiN膜>10nm/min； 4)、基片大小：单片≤200mm（8英寸），可放置多片；气路:八路管路并配质量流量计，流量范围0～2000sccm。

2、 招标文件售价(中/英文)：每包每套1000元或160美元
3、 购买招标文件时间(中/英文)：即日起每天上午9:00-16:00（北京时间，节假日除外）。
4、 购买招标文件地点(中/英文)：北京市复兴门外大街A2号中化大厦一楼大厅西侧
5、 投标截至时间和开标时间：2014年12月4日9:00
6、 开标地点(中/英文)：北京市海淀区知春路翠宫饭店3层振英厅

邮编：100045
电子邮箱：wei_ping@sinochem.com
电话：+8610-5936 9615； 传 真：+8610-5936 9782
联系人(中/英文)：卫平 先生 Mr. Wei Ping;
人民币开户银行(中/英文)：工商银行北京长安支行; .
帐号：****************750

外币开户银行：中国银行股份有限公司北京丰台支行
帐号：********5282 (美元), ********7855(欧元), ********5289 (其他外币)；
SWIFT Code: BKCH CN BJ 110

SINOCHEM International Tendering Co., Ltd., entrusted by the Buyer,
hereby carries out public bid for the supply of the following goods and
related services, and now invites eligible bidders to attend the bidding

Package1: Multifunctional Coating Machine 1 set
1). The equipment has a plasma enhanced chemical vapor deposition system (hereinafter referred to as PECVD) and magnetron sputtering (DC, RF) function, may carry on the dielectric film (mainly SiO, SiN), a metal film (mainly Au, Ti, Cr) thin films preparation;

2). Multifunctional Coating Machine by the PECVD system and the composition of magnetron sputtering system. The PECVD system consists of vacuum system, a reaction chamber, air inlet system and control system etc.. Magnetron sputtering system is mainly composed of a film coating chamber, vacuum system, intake system, measuring system, control system etc.. Should not interfere with each other by magnetron sputtering and PECVD system is working, the other electrical equipment operation, shall not interfere with film thickness monitoring system operation and control accuracy, this equipment can adopt modular system integration;

3). Muromoto Masora: the reaction is less than or equal to 1mTorr, the film uniformity: less than or equal to 3% (substrate size, 100mm): SiO2 film deposition rate > 40 nm/min, SiN > 10 nm/min film;

4). Substrate size: single chip is less than or equal to 200mm (8 inches), can be placed with a plurality of tablets; gas road: Road eight line and mass flowmeter, flow range 0 ~ 2000sccm。

2. Price of Bidding Document: RMB1000 or USD160 for each complete set of package. Bidding Document is non-refundable (if mail order, with additional RMB100.00 or USD15.00).
3. Time for obtaining Bidding Documents: Before Oct.14th 9:00~16:00 (Beijing Time) every day (excl. holidays).
4. Place for obtaining Bidding Documents: West Side of the Lobby, SINOCHEM Tower, A2, Fuxingmenwai Dajie, Beijing 100045, P. R. China.
Contact person: Mr. Wang Xiaobin, Phone: ***-********
5. Deadline of Bid Submission and Bid Opening Time: 9:00pm (Beijing Time), Oct.14th, 2014.

SINOCHEM International Tendering Co., Ltd.
Address: 20th Floor, SINOCHEM Tower, A2, Fuxingmenwai Dajie, Beijing 100045, P. R. China.
Post code: 100045
Tel: ***-********/9692
Fax: ***-********
Contact person: Mr. Wei Ping

Bank Name: Industrial and Commercial Bank of China, Changan Branch
Account no. (for documents purchase and bid security by RMB): ****************750
Bank Name: Fengtai Branch, Beijing, Bank of China
Account no. (for documents purchase by foreign currency): ********5289
Account no. (for bid security by foreign currency): ********5282 (USD), ********7855(EUR), ********5289 (other foreign currencies)

SWIFT Code: BKCH CN BJ 110