序号

产品名称

数量

简要技术规格

0714-1540CSOTT205/210

阵列涂布高温烘烤机

1

本设备主要用于TFT LCD 的Normal PR及PFA PR显影后烘烤。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/211

彩膜显影机

1

本设备主要用于彩色过滤器上的8.5 Generation Develop Black Matrix /Green /Blue /White /Photo Space On Photo Resist。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/212

化学成膜前清洗机，物理成膜前清洗机，氧化铟锡成膜前清洗机

2+1+1

本设备主要用于镀膜前清洗玻璃用。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/213

显影液管理系统

1+1

本设备主要用于TFT LCD陈列黄光显影回收系统要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良

0714-1540CSOTT205/214

湿法剥离机

1

本设备主要用于剥离工艺。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/215

低温退火炉

1

本设备主要用于TFT LCD of Anneal Oven for ITO anneal。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/216

彩膜预烘机

1

本设备主要用于8.5代彩膜制程的光阻烘烤和冷却。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。并且厂商也必须对应在会议中或电子邮件中与CSOT达成共识之要求。

0714-1540CSOTT205/217

铜酸分析仪

1

本设备主要用于量测分析Cu Etchant 关键成份浓度。本设备监控蚀刻液关键成份浓度保证制程能力，抑制工程不良发生；保证制程能力下最大限度地使用蚀刻液，另通过补液等动作节省蚀刻液做到Cost Down。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构紧凑，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/218

自动包装机

7

本设备主要用于LCD工艺中面板自动包装，面板的出货前打包，面板的分类打包，面板的出货前外观检查，面板的重力不均检查。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构坚固，整机运行稳定可靠，售后服务优良。

0714-1540CSOTT205/219

端子短路环激光切除机，大尺寸碳化修补机

1+1

本设备主要用于LCD工艺中面板端子短路环的切除，面板点，线不良的修复。要求该设备结构设计合理，采用先进成熟技术，保证系统具有良好的动态品质，在操作过程中操作者的视线要好。所选控制系统执行元件精度高，可靠性好，响应速度快。设备使用、操作、维修方便，造型美观，结构坚固，整机运行稳定可靠，售后服务优良。

NO.

Product Name

Quantity

Main Technical Data

0714-1540CSOTT205/210

Array PFA Oven

1

The System Is Mainly Used For TFT LCD Of Coating & Develop System For Pattern Generation. This System Is Required To Be Reasonable In Design, With Advanced Technology To Ensure The System An Excellent Kinetic Performance. The Action Elements Selected For The Control System Shall Be Of High Accuracy, Good Reliability And Rapid Response. The Machine Shall Be Convenient For Use, Operation And Maintenance, Be Artistic In Configuration, Compact In Structure, Stable In Performance And Satisfactory In After-Sale Service.

0714-1540CSOTT205/211

CF Developer

1

This system is mainly used for 8.5 Generation Develop Black Matrix/Green/Blue/White/Photo Space On Photo Resist. This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.

0714-1540CSOTT205/212

CVD HDC，Metal HDC，ITO HDC

2+1+1

The system is mainly used for cleaning TFT-glass before sputter This System Is Required To Be Reasonable In Design, With Advanced Technology To Ensure The System An Excellent Kinetic Performance. The Action Elements Selected For The Control System Shall Be Of High Accuracy, Good Reliability And Rapid Response. The Machine Shall Be Convenient For Use, Operation And Maintenance, Be Artistic In Configuration, Compact In Structure, Stable In Performance And Satisfactory In After-Sale Service.

0714-1540CSOTT205/213

DCS&DDS

1+1

The system is mainly used for TFT LCD of Array Photo Developer Recycle System This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.

0714-1540CSOTT205/214

Stripper

1

The system is mainly used for TFT LCD of PR Coating Glass Stripping System for pattern generation. This System Is Required To Be Reasonable In Design, With Advanced Technology To Ensure The System An Excellent Kinetic Performance. The Action Elements Selected For The Control System Shall Be Of High Accuracy, Good Reliability And Rapid Response. The Machine Shall Be Convenient For Use, Operation And Maintenance, Be Artistic In Configuration, Compact In Structure, Stable In Performance And Satisfactory In After-Sale Service.

0714-1540CSOTT205/215

ITO OVEN

1

The system is mainly used for TFT LCD of Anneal Oven for ITO anneal. Glass transfer system should be able to use 0.5t～0.7t glass. This System Is Required To Be Reasonable In Design, With Advanced Technology To Ensure The System An Excellent Kinetic Performance. The Action Elements Selected For The Control System Shall Be Of High Accuracy, Good Reliability And Rapid Response. The Machine Shall Be Convenient For Use, Operation And Maintenance, Be Artistic In Configuration, Compact In Structure, Stable In Performance And Satisfactory In After-Sale Service.

0714-1540CSOTT205/216

CF HP/CP

1

This system is mainly used for 8.5 Generation Photo Resist Baking and cooling System of Photo Line on Color Filter. This System Is Required To Be Reasonable In Design, With Advanced Technology To Ensure The System An Excellent Kinetic Performance. The Action Elements Selected For The Control System Shall Be Of High Accuracy, Good Reliability And Rapid Response. The Machine Shall Be Convenient For Use, Operation And Maintenance, Be Artistic In Configuration, Compact In Structure, Stable In Performance And Satisfactory In After-Sale Service.

0714-1540CSOTT205/217

(Cu)Chemical Solution Concentration Monitors

1

This equipment is mainly used for measuring analysis Cu Etchant key ingredient concentration. This equipment to monitor etching liquid key ingredient concentration process capability, reduce the project; Ensure that the process capability of using etching liquid, the other by the movements of the rehydration and save etching liquid to do Cost Down. This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.

0714-1540CSOTT205/218

Dense Pack Machine

7

The system is mainly used for panel Dense Pack in LCD process This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.

0714-1540CSOTT205/219

Laser Shorting Cut，Carbonization Panel Machine(Big)

1+1

The system is mainly used for Cutting short ring. This system is required to be reasonable in design, with advanced technology to ensure the system an excellent kinetic performance. The action elements selected for the control system shall be of high accuracy, good reliability and rapid response. The machine shall be convenient for use, operation and maintenance, be artistic in configuration, compact in structure, stable in performance and satisfactory in after-sale service.